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Microelectromechanical systems

Topic sh97007351 · TK7875 · id.loc.gov

Used for

  • MEMS (Microelectromechanical systems)
  • Micro-electro-mechanical systems
  • Micro-machinery
  • Microelectromechanical devices
  • Micromachinery
  • Micromachines
  • Micromechanical devices
  • Micromechanical systems

Broader Terms (2)

Related Terms (1)

Hierarchy

Broader groupings: |

Narrower Terms (6)